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Propiedades Ópticas de Películas Delgadas de a-Si:H Producidas por Evaporacion
Keywords:
Películas delgadas de a-Si, H, transmitancia, reflectancia, parámetros de deposición (es)Downloads
Mediciones de transmitancia y reflectancia para películas delgadas de a-Si:H depositadas por evaporación rápida bajo varias condiciones de temperaturas de sustrato Ts y presiones parciales de hidrógeno Ph se llevaron a cabo.
EI corrimiento del borde de absorción tanto con Ts y Ph se estudió y correlacionó con el contenido de hidrógeno y los parámetros de deposición.
The Reflectance and Transmitance measurements of a-Si:H thin films prepared by quick evaporation under various substrate temperature Ts and hydrogen partial pressure Ph, have been carried out.
Shift absorption edge with Ts and Ph has been studied and related to the hydrogen content and the deposition parameters.
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