Published

2012-09-01

The corrosion resistance and microstructure of UBM system-deposited NbxSiyNz thin films

Resistencia a la corrosión y microestructura de recubrimientos de NbxSiyNz depositadas con el sistema UBM

Keywords:

Corrosion, diffraction, spectroscopy, fluorescence, microstructure, microscopy, race track, x ray, thin film, sputtering, polarisation (en)
Corrosión, Difracción, Espectroscopia, Fluorescencia, Microestructura, Microscopia, race track, Rayos X, Recubrimientos, Sputtering, Polarización (es)

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Authors

  • Leonardo Velasco Estrada Universidad Nacional de Colombia
  • Jhon Jairo Olaya Florez Universidad Nacional de Colombia
  • Rodolfo Rodríguez Baracaldo Universidad Nacional de Colombia

NbxSiyNz thin film nanostructure was grown using the unbalanced magnetron sputtering (UBM) technique with varying Si content. Corrosion resistance was evaluated by potentiodynamic polarisation technique in a 3% NaCl solution. Microstructure was analysed by X-ray diffraction (XRD), scanning electron microscopy (SEM) and laser scanning microscopy. Chemical composition was ascertained by X-ray fluorescence (XRF) technique. The results showed that deposition rates increased with higher Si content. A microstructural change was observed for greater than 5% Si content through the transition from a crystalline to an amorphous structure in the thin films. Corrosion test results demonstrated that the thin films having the highest silicon content had better corrosion resistance.

En este trabajo se produjeron recubrimientos nanoestructurados de NbxSiyNz sobre acero inoxidable AISI 304 mediante la técnica del UBM (unbalanced magnetrón - sputtering con magnetrón desbalanceado), variando el contenido de Si, y se evaluó su resistencia frente al fenómeno corrosivo por medio de la técnica de polarización potenciodinámica en una solución al 3% de NaCl. La microestructura de los recubrimientos se analizó por medio de XRD (X ray diffraction - difracción de rayos X), SEM (scanning electron microscopy - microscopia electrónica de barrido) y microscopia láser confocal. La composición química se identificó con la técnica XRF (X ray fluorescence - fluorescencia de rayos X). Como resultado las tasas de depósito se incrementaron con la adición de Si, además se observó un cambio en la microestructura para contenidos superiores a 5% de Si, mediante la transición de un recubrimiento cristalino a amorfo. Finalmente, los resultados de corrosión sugieren que los recubrimientos con un alto contenido de silicio tienen un mejor comportamiento frente a la corrosión del sistema.

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Copyright (c) 2012 Leonardo Velasco Estrada, Jhon Jairo Olaya Florez, Rodolfo Rodríguez Baracaldo

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