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Preferential orientation in metal nitride deposited by the UBM system
Orientación preferencial en nitruros metálicos depositados con el sistema UBM
DOI:
https://doi.org/10.15446/ing.investig.v30n1.15220Keywords:
metal nitride, unbalanced magnetron, UBM, reactive sputtering (en)nitruros metálicos, magnetrón desbalanceado, UBM, sputtering reactivo (es)
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This work was aimed at studying the influence of ion bombardment on the preferred orientation (OP) of transition metal nitrides (TMN) produced by the reactive sputtering technique with a variable unbalanced magnetron through permanent magnets. Titanium nitride (TiN) coatings were thus studied by varying two parameters: ion-atom ratio on the substrate (Ji/Ja) and nitrogen flux. Deposition conditions were as follows: 7 mTorr working pressure, ~ 380ºC substrate temperature, 2 and 8.5 sccm nitrogen flux and 245-265 discharge power. The results showed that preferred orientation (111) and the crystalline behaviour of the produced coatings depended more on nitrogen flux than on ion bombardment. Similarly, micro-hardness measured on films deposited on steel AISI-M2 substrates increased from 1600 to 2000 HV0.025 when nitrogen flux was increased.
El propósito de este trabajo es el de estudiar la influencia del bombardeo de iones sobre la orientación preferencial (OP) en nitruros metálicos de transición (NMT) producidos utilizando la técnica de sputtering reactivo con magnetrón desbalanceado variable mediante imanes permanentes (UBM). Para ello, se estudiaron recubrimientos de nitruro de titanio (TiN) variando dos parámetros: la razón iones-átomos sobre el sustrato (Ji/Ja) y el flujo de nitrógeno. Las condiciones de depósito fueron: presión de trabajo de 7 mtorr, temperatura del sustrato ~ 380ºC, flujo de nitrógeno 2 y 8,5 sccm, y las potencias de la descarga variaron entre 245 W y 265 W. Los resultados demuestran que la orientación preferencial (111) y la cristalinidad de los recubrimientos producidos depende más del flujo de nitrógeno que del bombardeo iónico. De manera similar, la microdureza medida en películas depositadas sobre sustratos de acero AISI-M2 aumentó desde 1.600 hasta 2.000 HV0.025 al incrementarse el flujo de nitrógeno.
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Copyright (c) 2010 Jhon Jairo Olaya, Diana Maritza Marulanda, Sandra Rodil
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